At the base above , a modified method of designing multilayer mirrors was put forward , from which the roughness of substrate are confirmed . so the design had finished 用該方法確定了基底粗糙度的設(shè)計值,從而完成了多層膜反射鏡的設(shè)計。
Because soft x ray multilayer mirrors have high reflectivity and strip filter function , their applying territories are expanded contimuously . various fields in x ray optics grow strong demands for them 由于軟x射線多層膜反射鏡具有高反射率和帶通濾波的特點, x光學的各個領(lǐng)域?qū)χa(chǎn)生了強烈的需求。
The measurement results show that the multilayer mirrors designed and fabricated by this paper have practical reflectance . it needs to point out especially that at r = 1 . 03nm the peak reflectance of the multilayer mirror is 10 % 測量結(jié)果表明:本文所研制的多層膜反射鏡均具有實用的反射率,特別是中心波長為1 . 03nm的多層鏡,其峰值反射率達到10 。
With the furthermore development of ultra thin film technology , soft x - ray multilayer mirrors was applied in many fields , such as astronomy , microscope technology , euv lithogrphy , x - ray laser , icf diagnosis and so on 隨著軟x射線超薄膜制備技術(shù)的不斷發(fā)展,軟x射線多層膜反射鏡已在多個領(lǐng)域中投入研究與應(yīng)用,如天文學、生物醫(yī)學顯微鏡、極紫外投影光刻技術(shù)、 x射線激光、高溫等離子體診斷等等。
In the depositing process , small angle x - ray diffraction method was used to measure thin films repeatedly , form which the optimized parameters of depositing soft x ray thin films were gained . under the parameters , five soft x ray multilayer mirrors were fabricated 在多層膜的淀積過程中,使用小角x射線衍射的方法對多層鏡進行了反復(fù)的標定,獲得了軟x射線短波段多層膜反射鏡沉積的優(yōu)化工藝參數(shù)。